ASTM F1094-1987(2005) 用直接加压分接抽样阀和用预先消毒塑料包法对电子和微电子器件加工用水微生物监测的测试方法

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【英文标准名称】:StandardTestMethodsforMicrobiologicalMonitoringofWaterUsedforProcessingElectronandMicroelectronicDevicesbyDirectPressureTapSamplingValveandbythePresterilizedPlasticBagMethod
【原文标准名称】:用直接加压分接抽样阀和用预先消毒塑料包法对电子和微电子器件加工用水微生物监测的测试方法
【标准号】:ASTMF1094-1987(2005)
【标准状态】:现行
【国别】:
【发布日期】:1987
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:电子工程;取样方法;监督(认可);阀门;抽样方法;水;试验;微生物分析
【英文主题词】:contamination;microbiologicalcontamination;microbiologicaltesting;semiconductorprocessing;water;waterdistributionsystem
【摘要】:Thesetestmethodsprovideafieldtechniqueforthebacteriologicalanalysisofelectronicprocesswaters.Thesamplingofthesewatersandsubsequentbacteriologicalanalysismaybecriticaltoelectronicproductyields.Bacteriacanbetheprimesourceofharmfulcontaminationwhichcansignificantlyreducetheyieldofsatisfactorymicroelectronicdeviceproduction.Thetestmethodsdescribedheremaybeusedbothtomonitorthebacteriologicalqualityofwaterusedinmicroelectronicproductprocessing,andtolocatethesourceofbacterialcontaminationinawaterpurificationsystem.Thesetestmethodsaresimplefieldmethods,combiningsamplingandbacteriologicalanalysistechniquesthatdonotrequirebacteriologicallaboratoryfacilities.Thetestmethodsdescribedemployculturetechniquesforbacteriologicalanalysis.Theusershouldbeawarethatsuchtechniquescannotprovideacompletecountofthetotalviablebacteriapresent,sinceclumpsandclustersofbacteriawillappearasonesinglecolonywhencultured,andsincesomeviablebacteriawillnotgrowunderthetestconditionsused.However,ameaningfulcomparativebacteriacountwillbeachievedbythismethodiftheculturingofthesampleisalwaysdoneatthesametemperature,andforthesameperiodoftime.Thetemperatureofincubationshouldalwaysbeat28x00B1;2x00B0;C,andtheperiodofincubationshouldbe48h(or72hiftimepermits).Theperiodofincubationandtemperatureshouldbethesameforallcomparativestudies.1.1Thesetestmethodscoversamplingandanalysisofhighpuritywaterfromwaterpurificationsystemsandwatertransmissionsystemsbythedirectsamplingtapandfiltrationofthesamplecollectedinthebag.Thesetestmethodscoverboththesamplingofwaterlinesandthesubsequentmicrobiologicalanalysisofthesamplebytheculturetechnique.Themicroorganismsrecoveredfromthewatersamplesandcountedonthefiltersincludebothaerobesandfacultativeanaerobes.1.2Threemethodsaredescribedasfollows:SectionsTestMethodA--SampleTap-DirectFiltration6to8TestMethodB--PresterilizedPlasticBagTechnique9to12TestMethodB2--DipStripTechnique2/PresterilizedPlasticBag